Standard Wafer Specifications

Wafer 2″ 3″ 4″ 5″ 6″ 8″  12″  16″ 
Standard Diameters (mm) 50.8 76.2 100 125 150 200 300 400
Diameter Tolerance (mm) 0.2 0.2 0.2 0.2 0.2 0.3 0.3 0.3
Standard Thickness (µm) 275 375 500 625 650 725 800 825
Standard Tolerance ±(µm) 25 25 25 25 25 50 50 50
Standard TTV (µm) <20 <25 <25 <40 <40 <50 <50 <100
Surface Roughness (Å) <20 <20 <20 <20 <20 <20 <20 <20
Surface Quality (MIL-0-13830) 60/40 60/40 60/40 60/40 60/40 80/50 80/50 80/50
Flatness (µm / 25.4mm) < 2 < 3 < 4 < 4 < 4 < 5 < 5 < 5
Parallelism (µm / 25.4mm) < 4 < 4 < 5 < 5 < 5 < 6 < 5 < 4
Machine Chamfered Edges yes yes yes yes yes yes yes yes
Maximum Edge Chip (mm) 0.25 0.25 0.25 0.25 0.25 0.25 0.25 0.25