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MARK OPTICS
STANDARD GEOMETRIC
DIMENSIONING
AND TOLERANCING ( GD & T )
Unless otherwise
specified on your
drawing(s),
these tolerances will be
applied.
Please note that our
process capabilities
exceed these tolerances.
REQUEST QUOTE |
GEOMETRIC CHARACTERISTICS AND
SYMBOLS
Mark Optics Standard Wafer Specifications
| Wafer |
2" |
3" |
4" |
5" |
6" |
8" |
12" |
16" |
| Standard Diameters (mm) |
50.8 |
76.2 |
100 |
125 |
150 |
200 |
300 |
400 |
| Diameter Tolerance (mm) |
0.2 |
0.2 |
0.2 |
0.2 |
0.2 |
0.3 |
0.3 |
0.3 |
| Standard Thickness
(µm) |
275 |
375 |
500 |
625 |
650 |
725 |
800 |
825
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| Standard Tolerance +/-
(um) |
25 |
25 |
25 |
25 |
25 |
50 |
50 |
50 |
| Standard TTV
(µm) |
<20 |
<25 |
<25 |
<40 |
<40 |
<50 |
<50 |
<100 |
| Surface Roughness
(Å) |
<20 |
<20 |
<20 |
<20 |
<20 |
<20 |
<20 |
<20 |
| Surface Quality
(MIL-0-13830) |
60/40 |
60/40 |
60/40 |
60/40 |
60/40 |
80/50 |
80/50 |
80/50 |
| Flatness
(µm / 25.4mm) |
< 2 |
< 3 |
< 4 |
< 4 |
< 4 |
< 5 |
< 5 |
< 5 |
| Parallelism
(µm / 25.4
mm) |
< 4 |
< 4 |
< 5 |
< 5 |
< 5 |
< 6 |
< 5 |
< 4 |
| Machine
chamfered edges |
yes |
yes |
yes |
yes |
yes |
yes |
yes |
yes |
| Maximum edge chip (mm) |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
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Mark
Optics Maximum Precision Capabilities
(Please
specify call-out when requesting a quotation)
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| Diameter tolerances
(µm) |
12.7 um |
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PHONE |
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714-545-6684 |
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| Thickness tolerances
(µm) |
12.7 um |
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FAX |
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714-545-3105 |
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| TTV
(µm) |
< 10 um |
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EMAIL |
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wafers@markoptics.com |
| Surface Roughness
(Å) |
< 5 A |
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WEBSITE |
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www.markoptics.com |
| Surface Quality
(µm) |
10/5 SQ |
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| Flatness (waves/25.4mm) |
1/20 wave |
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| Parallelism (Wedge)
(µm) |
< 5 seconds |
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| Polished
edges |
Yes |
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STANDARD SPECIFICATIONS
(UNLESS OTHERWISE SPECIFIED):
QUARTZ AND GLASS ARE
CLEANED TO CLASS 4 (COSMETIC
ONLY). UPON REQUEST, CLASS 3 TO
CLASS 1 IS AVAILABLE.
MARK OPTICS WILL USE
FINE DIAMONDS
FOR MACHINED SURFACES UNLESS
OTHER-WISE REQUESTED.
MEGASONIC
AND ULTRASONIC CLEANING IS
AVAILABLE UPON REQUEST.
STANDARD SURFACE FINISHES
(Ra):
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D
/VVV
N6
32√D .8µm
Diamond finish
(32µ")
G
/VVV
N5
16√D .4µm
Diamond Finish
(16µ")
MP
/VVV
N4
9√G .2 µm
Ground Finish (9µ")
FP
/VVVV
N1
1√MP .025 µm
Ground & Polish Finish
(1µm")
LP
/VVVV
N2
2√FP .05 µm
Flame Polish Finish
(2µ")
/VVVV
√LP 5 Å
Laser Polish
*** OTHER SURFACE
FINISHES AVAILABLE UPON REQUEST
***
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