Mark Optics Standard Wafer Specifications

Wafer 2" 3" 4" 5" 6" 8"  12"  16" 
Standard Diameters (mm) 50.8 76.2 100 125 150 200 300 400
Diameter Tolerance (mm) 0.2 0.2 0.2 0.2 0.2 0.3 0.3 0.3
Standard Thickness (µm) 275 375 500 625 650 725 800

825
Standard Tolerance +/- (um) 25 25 25 25 25 50 50 50
Standard TTV (µm) <20 <25 <25 <40 <40 <50 <50 <100
Surface Roughness (Å) <20 <20 <20 <20 <20 <20 <20 <20
Surface Quality (MIL-0-13830) 60/40 60/40 60/40 60/40 60/40 80/50 80/50 80/50
Flatness (µm / 25.4mm) < 2 < 3 < 4 < 4 < 4 < 5 < 5 < 5
Parallelism (µm / 25.4 mm) < 4 < 4 < 5 < 5 < 5 < 6 < 5 < 4
Machine chamfered edges yes yes yes yes yes yes yes yes
Maximum edge chip (mm) 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1
                 

Mark Optics Maximum Precision Capabilities
 (Please specify call-out when requesting a quotation)
Diameter tolerances (µm) 12.7 um PHONE 714-545-6684
Thickness tolerances (µm) 12.7 um FAX 714-545-3105
TTV (µm) < 10 um EMAIL wafers@markoptics.com
Surface Roughness (Å) < 5 A WEBSITE www.markoptics.com
Surface Quality (µm) 10/5 SQ
Flatness (waves/25.4mm) 1/20 wave
Parallelism (Wedge) (µm) < 5 seconds
Polished edges Yes

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