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ISO 14644-1 Cleanroom Standards
Mark Optics has an outer Class 8 cleanroom
that tested at 13,000 – 18,000 particles size 0.5 um,
our inner room is a Class 6 and under the hood is a Class 5.
Collected from Wikipedia.com
Though originating in the United States, the standard
Federal Standard 209E
was the first and most commonly referred to. This standard was
replaced in 1999 by an international standard, however Federal
Standard 209E remains today the most widely referenced standard
in the world.
US FED STD 209E
Cleanroom Standards
|
Class |
0.1 µm |
0.2 µm |
0.3 µm |
0.5 µm |
1 µm |
5 µm |
|
1 |
35 |
7 |
3 |
1 |
|
|
|
10 |
350 |
75 |
30 |
10 |
1 |
|
|
100 |
3500 |
750 |
300 |
100 |
10 |
1 |
|
1,000 |
|
|
|
1,000 |
100 |
10 |
|
10,000 |
|
|
|
10,000 |
1,000 |
100 |
|
100,000 |
|
|
|
100,000 |
10,000 |
1,000 |
The Replacement standard is ISO 14644-1 and is
meant to completely replace Federal Standard 209E. Each of these
standards represents the maximum allowable number of particles
in a unit of air. The typical unit is either cubic feet or cubic
meters. The particle counts are always listed as cumulative.
ISO 14644-1 Cleanroom
Standards
|
particle/m³ |
|
Class |
0.1 µm |
0.2 µm |
0.3 µm |
0.5 µm |
1.0 µm |
5.0 µm |
|
ISO 1 |
10 |
2 |
|
|
|
|
|
ISO 2 |
100 |
24 |
10 |
4 |
|
|
|
ISO 3 |
1,000 |
237 |
102 |
35 |
8 |
|
|
ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
|
ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
|
ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
|
ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
|
ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
|
ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
Cleanroom Class Comparison
|
ISO 14644-1 |
FED STD 209E |
|
ISO 3 |
1 |
|
ISO 4 |
10 |
|
ISO 5 |
100 |
|
ISO 6 |
1,000 |
|
ISO 7 |
10,000 |
|
ISO 8 |
100,000 |
|